High Sensitivity: SIMS can detect elements in parts per million (ppm) or even parts per billion (ppb) concentrations. Spatial Resolution: The technique can achieve spatial resolutions down to the nanometer scale, making it highly effective for nanoscale analysis. Depth Profiling: SIMS can perform depth profiling to analyze layer compositions and thicknesses. Isotopic Analysis: It can distinguish between different isotopes of the same element, useful for studying isotopic labeling and tracing.
