Gas load can be measured using several techniques, such as:
Residual Gas Analysis (RGA): This technique uses a mass spectrometer to identify and quantify the gases present in the system. Pressure Gauges: Devices like ionization gauges and thermocouple gauges measure the pressure within the vacuum system, which can be correlated to the gas load. Quadrupole Mass Spectrometry (QMS): Similar to RGA but often used for more precise measurements.
