Thermal calibration involves several steps, including the use of specialized equipment and techniques. Some common methods include:
Scanning Thermal Microscopy (SThM): This technique uses a thermal probe to measure temperature distributions at the nanoscale. The probe can detect temperature variations with high spatial resolution, making it ideal for calibrating nanoscale devices. Thermocouples: These devices measure temperature by converting thermal energy into electrical signals. They are often used in conjunction with microheaters to maintain precise temperature control. Infrared (IR) thermography: This method uses IR cameras to visualize temperature distributions on the surface of a nanoscale device. It provides a non-contact way to measure temperature, reducing the risk of contamination or damage.
