How is PECVD used in specific nanotechnology applications?
PECVD finds applications in various nanotechnology fields:
Microelectronics: Used for depositing dielectric layers, passivation layers, and gate insulators in semiconductor devices. Solar Cells: Applied in the fabrication of thin-film photovoltaic cells to deposit anti-reflective coatings and passivation layers. MEMS Devices: Employed in the production of micro-electromechanical systems (MEMS) for coating and insulating components. Optoelectronics: Used to deposit thin films for light-emitting diodes (LEDs), laser diodes, and photodetectors.
