Roughing Pumps: These pumps reduce the pressure to a medium vacuum level (around 10-3 to 10-6 torr). High Vacuum Pumps: Once the roughing pump has lowered the pressure, high vacuum pumps like turbomolecular or cryogenic pumps take over to achieve the desired high vacuum levels. Measurement: Instruments such as ion gauges and residual gas analyzers monitor the vacuum levels to ensure the environment remains within the required parameters.
