NIL operates by a straightforward yet highly precise process. The main steps include:
1. Mold Preparation: A mold with the desired nano-scale patterns is fabricated, often using methods like electron beam lithography. 2. Imprint Process: The mold is pressed into a resist material, typically a polymer or other soft material, at a controlled temperature and pressure. 3. Pattern Transfer: After imprinting, the resist material is cured, solidifying the pattern. Any residual layers may be etched away to complete the pattern transfer.
