The working of a chamber depends on its type and application, but generally involves the following steps:
Preparation: The substrate and materials are prepared and placed inside the chamber. Sealing: The chamber is sealed to create a controlled environment. Process Initiation: The desired process (e.g., deposition, etching) is initiated, and parameters are controlled via computer systems. Monitoring: The process is continuously monitored to ensure it proceeds as planned. Completion: Once the process is complete, the chamber is opened, and the processed substrate is removed for further analysis or use.
