The manufacturing of high aspect ratio tips involves several sophisticated techniques:
- Electron Beam Lithography: This technique uses focused beams of electrons to create patterns on a substrate, which are then developed to form the tips. - Focused Ion Beam (FIB) Milling: FIB milling is used to sculpt materials at the nanoscale, allowing for the precise formation of high aspect ratio tips. - Chemical Vapor Deposition (CVD): CVD can be used to grow thin films and structures with high aspect ratios by depositing material from the vapor phase.
