The fabrication of nanomechanical systems often involves both top-down and bottom-up approaches. Top-down methods include lithography and etching techniques used to carve out nano-sized structures from larger materials. Bottom-up approaches involve assembling structures atom-by-atom or molecule-by-molecule, often using self-assembly techniques. Advanced methods such as focused ion beam (FIB) milling and atomic layer deposition (ALD) are also employed.
