What Technologies Aid in Enhancing Alignment and Overlay Accuracy?
Several advanced technologies aid in enhancing alignment and overlay accuracy. Metrology tools such as atomic force microscopes (AFMs) and scanning electron microscopes (SEMs) provide high-resolution imaging to inspect and adjust alignment. Feedback control systems utilize real-time data to make adjustments during the fabrication process. Techniques like nanoimprint lithography offer high precision by physically molding nanoscale features rather than relying on chemical processes.