Several factors impact the rate and pattern of target erosion:
Ion Energy: Higher energy ions generally result in higher erosion rates. Ion Flux: The density of ions impacting the target also affects the erosion rate. Target Material: Different materials exhibit varying resistance to erosion based on their physical and chemical properties. Angle of Incidence: The angle at which ions strike the target can influence the erosion pattern. Temperature: Elevated temperatures can enhance erosion by increasing the mobility of atoms in the target material.
