What are the Strategies to Mitigate Threshold Voltage Variability?
Several strategies can be employed to mitigate threshold voltage variability in nanoscale transistors:
Advanced Lithography Techniques: Improved lithography techniques can reduce variations in channel length and line edge roughness. Strain Engineering: Applying mechanical strain to the semiconductor material can enhance carrier mobility and reduce variability. High-k Dielectrics: Using high-k dielectric materials can reduce gate leakage and improve threshold voltage control. Multi-Gate Transistors: Devices such as FinFETs provide better electrostatic control and reduce variability. Process Control: Improved control over the manufacturing process can reduce variations in dopant placement and gate oxide thickness.
