MEMS manufacturing involves several sophisticated techniques, many of which are borrowed from semiconductor fabrication. Some of the common methods include:
Photolithography: This technique is used to transfer a pattern onto a substrate, which is then etched to create the desired microstructures. Etching: Both wet and dry etching techniques are employed to remove material and create intricate micro-features. Deposition: Various chemical and physical deposition methods are used to add layers of materials, which are then patterned and etched. Surface Micromachining: This involves depositing and etching multiple layers to build up the desired microstructures.
