advanced metrology

What are the Key Techniques Used in Nanometrology?

Several advanced techniques are employed in nanometrology to achieve high precision and accuracy:
Atomic Force Microscopy (AFM): AFM provides high-resolution imaging and measurement of surface topography at the atomic level.
Scanning Electron Microscopy (SEM): SEM offers detailed images of nanostructures with high depth of field and magnification.
Transmission Electron Microscopy (TEM): TEM is used for imaging and analyzing the internal structure of nanomaterials.
X-ray Diffraction (XRD): XRD is employed to determine the crystalline structure and phase composition of nanomaterials.
Spectroscopy: Techniques such as Raman spectroscopy and Fourier Transform Infrared (FTIR) spectroscopy are used to analyze the chemical composition and molecular structure of nanomaterials.

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