Several techniques are employed for achieving high measurement accuracy at the nanoscale:
1. Atomic Force Microscopy (AFM): Utilizes a mechanical probe to interact with the surface of a sample, providing topographical data with atomic resolution. 2. Scanning Electron Microscopy (SEM): Uses focused beams of electrons to generate high-resolution images of samples. 3. Transmission Electron Microscopy (TEM): Involves transmitting electrons through a specimen to form an image. 4. X-ray Diffraction (XRD): Helps in determining the crystallographic structure of materials at atomic scales. 5. Nanoindentation: Measures mechanical properties such as hardness and elastic modulus at the nanoscale.