What are the Challenges in Integrating Nanotechnology with MEMS?
Despite the promising applications, there are several challenges in integrating nanotechnology with MEMS:
Fabrication Complexity: Creating devices that incorporate both micro and nano-scale components requires advanced fabrication techniques, which can be complex and costly. Material Compatibility: Ensuring that nanomaterials are compatible with existing MEMS processes and materials is crucial for reliable device performance. Reliability and Durability: MEMS devices must operate reliably over extended periods. Incorporating nanomaterials can sometimes introduce new reliability issues. Scaling Up Production: Translating laboratory-scale innovations to mass production poses significant challenges in terms of cost, quality, and consistency.