microelectromechanical systems

What are the Challenges in Integrating Nanotechnology with MEMS?

Despite the promising applications, there are several challenges in integrating nanotechnology with MEMS:
Fabrication Complexity: Creating devices that incorporate both micro and nano-scale components requires advanced fabrication techniques, which can be complex and costly.
Material Compatibility: Ensuring that nanomaterials are compatible with existing MEMS processes and materials is crucial for reliable device performance.
Reliability and Durability: MEMS devices must operate reliably over extended periods. Incorporating nanomaterials can sometimes introduce new reliability issues.
Scaling Up Production: Translating laboratory-scale innovations to mass production poses significant challenges in terms of cost, quality, and consistency.

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