What are the applications of PECVD in Nanotechnology?
PECVD is employed in various applications including:
Solar Cells: For the deposition of silicon nitride anti-reflective coatings and passivation layers. Semiconductors: In the fabrication of electronic components and integrated circuits. Sensors: For creating sensitive layers in gas sensors and biosensors. Protective Coatings: Providing wear resistance and corrosion protection on nanostructures.
