electron impact ionization

What are the Applications of Electron Impact Ionization in Nanotechnology?

There are several key applications:
Nanofabrication: Using electron beams to etch or deposit materials at the nanoscale.
Mass Spectrometry: Identifying and quantifying molecules by ionizing them and measuring their mass-to-charge ratio.
Surface Analysis: Techniques like X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES) rely on electron impact ionization to analyze surface compositions.
Material Modification: Altering the properties of materials through ion implantation, which relies on ionizing atoms and embedding them into a substrate.

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