What are the advantages of PECVD over traditional CVD?
PECVD offers several advantages over traditional CVD techniques:
Lower Temperature Processing: Allows for deposition on substrates that cannot withstand high temperatures. Improved Film Quality: Enhanced control over film properties such as uniformity, adhesion, and composition. Versatility: Compatible with a wide range of precursor gases and materials. High Deposition Rates: Faster deposition speeds compared to other methods.
