1. High Sensitivity: CARs require less exposure energy, reducing the time and cost of lithographic processes. 2. Fine Resolution: The catalytic nature allows for the creation of very small features, essential for advanced nanotechnology applications. 3. Versatility: CARs can be used with various types of radiation, including ultraviolet (UV), extreme ultraviolet (EUV), and electron beams, making them adaptable to different lithographic techniques.
