The primary benefits of 3D NAND Flash include increased storage density, lower cost per bit, and improved reliability and endurance compared to 2D NAND. By stacking multiple layers of memory cells, manufacturers can achieve higher storage capacities without increasing the chip's physical size. Additionally, the vertical structure of 3D NAND improves data retention and reduces the likelihood of cell-to-cell interference, which is a common issue in 2D NAND.