Choosing the right deposition technique depends on several factors:
- Material Requirements: Different techniques are better suited for different materials. For example, ALD is ideal for oxides and nitrides. - Substrate Compatibility: Some techniques require specific substrate properties, such as temperature tolerance. - Film Thickness and Uniformity: Techniques like ALD and MBE offer high precision and uniformity, making them suitable for ultra-thin films. - Cost and Equipment: Some techniques require expensive equipment and are more costly to operate.
