Several techniques are used for surface finishing at the nanoscale, including:
1. Chemical Vapor Deposition (CVD): This method involves depositing a thin film of material onto a substrate through chemical reactions of gaseous precursors. 2. Physical Vapor Deposition (PVD): This technique involves the physical transfer of material from a source to a substrate, often through processes like sputtering or evaporation. 3. Atomic Layer Deposition (ALD): A highly controlled process that allows for the deposition of atomic layers of material, providing excellent uniformity and precision. 4. Electroplating: This process involves coating a material with a thin layer of metal using an electric current. 5. Nanoimprint Lithography: This technique uses a physical mold to create nanoscale patterns on a substrate.