How is Lithium Niobate Fabricated at the Nanoscale?
Fabricating lithium niobate at the nanoscale involves several sophisticated methods: - Lithography: Techniques such as electron-beam lithography and photolithography are used to pattern lithium niobate films with nanometer precision. - Chemical Vapor Deposition (CVD): This method allows for the deposition of thin lithium niobate films, essential for creating nanostructures. - Ion Implantation: Ions are implanted into lithium niobate to modify its properties at the nanoscale, enabling tailored functionalities.