The thermal NIL process typically involves the following steps:
Mold fabrication: A mold with the desired nanoscale features is created, often using techniques like electron-beam lithography or focused ion beam milling. Polymer coating: A thin layer of thermoplastic polymer is spin-coated onto the substrate. Imprinting: The mold is pressed into the polymer layer while heating it above its glass transition temperature, allowing the polymer to flow and conform to the mold's features. Cooling: The system is cooled, solidifying the polymer and locking in the nanoscale pattern. Demolding: The mold is carefully removed, leaving behind a nanoscale imprint on the polymer surface.
