The process starts with the preparation of a precursor solution, which contains the desired metallic or non-metallic compounds dissolved in a solvent. This solution is then atomized using an ultrasonic or pneumatic atomizer to create fine droplets. These droplets are carried into a hot zone by an inert carrier gas, typically nitrogen or argon. Upon reaching the high-temperature zone, the solvent evaporates, and the precursor undergoes thermal decomposition, leading to the formation of nanoparticles.