In PAE, a high-voltage power supply generates pulsed electrical arcs that strike the target material, causing rapid heating and vaporization. The pulses are typically in the microsecond to millisecond range, allowing fine control over the deposition rate and film thickness. The vaporized atoms or molecules then travel through a vacuum chamber and condense on a substrate, forming a thin film. The vacuum environment minimizes contamination and ensures high purity of the deposited film.
