The resolution of an optical system determines its ability to distinguish between two closely spaced objects. According to the Abbe diffraction limit, the resolution d is given by: d = λ / (2 * NA) where λ is the wavelength of light used. As the NA increases, the resolution improves, allowing for more detailed observations. This is particularly important in nanolithography, where precise patterning at the nanoscale is necessary for semiconductor manufacturing.
