Nanopositioning systems generally consist of three main components: actuators, sensors, and controllers. Actuators are responsible for generating movement and can include piezoelectric, electrostatic, or magnetic mechanisms. Sensors provide feedback on the position of the system, often using techniques such as laser interferometry or capacitive sensing. Finally, controllers process the feedback from the sensors and adjust the actuators to maintain the desired position, often utilizing sophisticated control algorithms to achieve high precision.
