Optimizing Etch Chemistry: Choosing the right etchant and etching conditions can significantly reduce damage. For example, using low-damage plasma etching techniques. Control of Etch Rate: Carefully controlling the etch rate can prevent over-etching and minimize physical damage. Post-Etch Treatments: Implementing post-etch cleaning and annealing processes to remove residues and repair damage. Advanced Etch Techniques: Utilizing advanced techniques like Atomic Layer Etching (ALE) for more precise control over the etching process.
