How are Surface Reactions Utilized in Nanofabrication?
In nanofabrication, surface reactions are employed to deposit, etch, or modify materials at the nanoscale. Techniques like chemical vapor deposition (CVD) and atomic layer deposition (ALD) rely on controlled surface reactions to build thin films and structures with atomic precision, which are essential for the development of advanced electronic devices and MEMS (Micro-Electro-Mechanical Systems).
