There are several methods to create grooves at the nanoscale, including lithography, etching, and self-assembly. Lithography techniques such as electron-beam lithography and photolithography can precisely pattern grooves onto a substrate. Etching processes, including reactive ion etching, can then be used to develop these patterns into deeper grooves. Self-assembly methods involve the spontaneous organization of molecules into structured patterns, forming grooves without the need for direct manipulation.
