Fabrication techniques for micro and nanostructures can be broadly classified into two categories: top-down and bottom-up approaches.
- Top-Down Approach: This method involves the miniaturization of bulk materials. Techniques such as lithography, etching, and milling are commonly used.
- Bottom-Up Approach: This method involves assembling structures atom-by-atom or molecule-by-molecule. Techniques such as chemical vapor deposition (CVD), self-assembly, and sol-gel process are frequently employed.