The fabrication of HARTs involves several advanced techniques:
1. Chemical Vapor Deposition (CVD): This method utilizes chemical reactions to deposit material layers, building up the high aspect ratio structures. 2. Electrochemical Etching: A process that uses electric current to etch materials, creating sharp, elongated tips. 3. Focused Ion Beam (FIB) Milling: A technique that employs a focused beam of ions to sculpt materials at the nanoscale, producing high aspect ratio structures. 4. Photolithography: Often combined with etching, this method uses light to pattern features on a substrate, followed by material removal to create high aspect ratio tips.
