GFIS differ significantly from other ion sources like Liquid Metal Ion Sources (LMIS) and Plasma Ion Sources: - Resolution: GFIS offer superior resolution due to the finer ion beam. - Ion Species: GFIS primarily use lighter gases, whereas LMIS typically use metals like gallium. - Application: GFIS are preferred for applications requiring minimal damage and high precision, unlike LMIS which might be used for broader ion implantation tasks.
