mit's research laboratory of electronics

What techniques are used in Nanofabrication at RLE?

RLE employs a variety of cutting-edge techniques for nanofabrication, including:
- [Electron Beam Lithography](#): A method for creating extremely fine patterns required for nanoscale devices.
- [Atomic Layer Deposition](#): A technique for depositing thin films one atomic layer at a time, ensuring precision and control over material properties.
- [Self-Assembly](#): Utilizing the natural tendency of molecules to organize into structured patterns, enabling the creation of complex nanoscale architectures.

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