Despite significant advancements, several challenges remain in the fabrication of nanoscale features:
Resolution and Precision Achieving the necessary resolution and precision is a significant challenge, particularly for top-down approaches. As feature sizes shrink, the limitations of current lithographic techniques become more pronounced.
Material Limitations At the nanoscale, materials often exhibit different properties than they do at larger scales. For example, quantum effects can dominate, making it difficult to predict and control material behavior.
Cost and Scalability While techniques like EBL offer high resolution, they are expensive and slow, making them less viable for large-scale production. Balancing precision with cost and scalability remains a significant hurdle.
