Fabrication techniques for microscale structures often overlap with those used in nanotechnology:
- Photolithography: A process that uses light to transfer a pattern onto a substrate, commonly used in semiconductor manufacturing. - Etching: Techniques such as wet etching and dry etching remove material to create microscale features. - Deposition: Chemical vapor deposition (CVD) and physical vapor deposition (PVD) are used to coat surfaces with thin films at the microscale.
