Focused Ion Beam Machining - Nanotechnology

What is Focused Ion Beam (FIB) Machining?

Focused Ion Beam (FIB) machining is a technique that uses a finely focused beam of ions to precisely remove material from a sample at the nanoscale. This method is commonly used in the fields of materials science, semiconductor engineering, and nanotechnology to create microstructures and nanostructures with high precision.

How Does FIB Work?

In FIB machining, a liquid metal ion source (LMIS) like gallium is heated to produce ions, which are then accelerated and focused into a narrow beam. This beam can be directed onto the surface of a sample, where the high-energy ions cause the sputtering of surface atoms, effectively milling or etching the material.

Applications in Nanotechnology

FIB is widely used for nanofabrication and nanolithography. Its applications include the creation of nanoelectronic devices, quantum dots, and nanowires. Additionally, FIB is instrumental in sample preparation for transmission electron microscopy (TEM) by enabling the precise thinning of samples.

Advantages of FIB Machining

One of the primary advantages of FIB machining is its ability to achieve sub-micron precision. This makes it suitable for high-resolution patterning and modification of nanostructures. Furthermore, FIB can be used in conjunction with other techniques like scanning electron microscopy (SEM) to provide real-time imaging and accurate placement of features.

Challenges and Limitations

Despite its advantages, FIB machining has some limitations. The high-energy ions can cause damage to the material, leading to the formation of an amorphous layer on the surface. Additionally, the technique is relatively slow and may not be suitable for large-scale manufacturing. The cost of FIB systems is also a significant consideration.

Future Prospects

The future of FIB machining in nanotechnology looks promising with ongoing research focused on improving the resolution and reducing the damage caused by ion beams. Advances in ion source technology, including the development of gas field ion sources (GFIS), hold the potential to further enhance the capabilities of FIB systems.

Relevant Publications

Spectral and microstructural analysis of the effect of the Gaimplantation on diamond: a CL-EELS study.

Issue Release: 2024

Controlling crystal cleavage in focused ion beam shaped specimens for surface spectroscopy.

Issue Release: 2024

Microstructure Evolution and Fretting Wear Mechanisms of Steels Undergoing Oscillatory Sliding Contact in Dry Atmosphere.

Issue Release: 2024

Enhanced Faraday rotation by a Fano resonance in substrate-free three-dimensional magnetoplasmonic structures.

Issue Release: 2023

Scalable substrate development for aqueous sample preparation for atom probe tomography.

Issue Release: 2023

Gas-assisted femtosecond pulsed laser machining: A high-throughput alternative to focused ion beam for creating large, high-resolution cross sections.

Issue Release: 2023

Quantification of gallium cryo-FIB milling damage in biological lamellae.

Issue Release: 2023

MC design and FIB preparation of a YSZ biochemical material microstructure.

Issue Release: 2023

Unmasking the Resolution-Throughput Tradespace of Focused-Ion-Beam Machining.

Issue Release: 2022

Cold photo-carving of halogen-bonded co-crystals of a dye and a volatile co-former using visible light.

Issue Release: 2022

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication.

Issue Release: 2021

Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning.

Issue Release: 2021

Fabrication Methods for Microfluidic Devices: An Overview.

Issue Release: 2021

A review of focused ion beam applications in optical fibers.

Issue Release: 2021

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces.

Issue Release: 2021

Microbeam bending of hydrated human cortical bone lamellae from the central region of the body of femur shows viscoelastic behaviour.

Issue Release: 2021

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization.

Issue Release: 2020

Focused ion beam preparation of microbeams for in situ mechanical analysis of electroplated nanotwinned copper with probe type indenters.

Issue Release: 2020

Computer-aided manufacturing and focused ion beam technology enable machining of complex micro- and nano-structures.

Issue Release: 2019

Monte Carlo simulation of nanoscale material focused ion beam gas-assisted etching: Ga and Ne etching of SiO in the presence of a XeF precursor gas.

Issue Release: 2019

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